Field Emission Scanning Electron Microscope with Environmental SEM

FEI Quanta 200F integrated with Oxford-EDS system IE 250 X Max 80, Netherlands


The Quanta 200 FEG uses a field-emission gun (FEG) electron source and can be switched between three vacuum modes enabling the investigation of conductive, non-conductive and high-vacuum incompatible materials. It offers nanometer resolution and a high signal to noise ratio in both regular high vacuum and environmental modes.

The EDS consists of an 80 mmSDD detector which enables detection of elements under high resolution.

  • Three vacuum modes - High, Low and ESEM modes
  • Samples can be studied in pressures up to 5 Torr
  • BSED, ETD, LFD and STEM detector are also incorporated
  • The Wet SEM provides imaging at relative humidity conditions up to 100%
  • Manual user interface EDS with 80 mmSDD detector can be used in three modes: point & ID, analyzer and mapping
  • Resolution: 2 nm
  • Surface morphology of all kinds of conductive and non-conductive samples including nano to micro scale structures, films, ceramics etc. can be analyzed
  • Texture information by performing phase identification through BSED
  • Elemental detection and orientation mapping can be done by EDS

Sample Specifications
  • Conductive and non-conductive solid samples can be analyzed
  • Non-conductive samples can be analyzed under low vacuum mode or must be sputter coated either with gold, platinum or silver for high vacuum mode
  • Gel and liquid samples can also be analyzed using Peltier stage under different conditions
  • Height: 1 - 1.5 cm
  • Minimum amount required for analysis 
    • 5 mg for powder sample
    • 1X1 cm2 for films
    • 100 µl for liquid sample
Testing Parameters
  • Magnification: 50X to approx 200,000X depending on the nature of the sample
  • Voltage: 2 kV to 30 kV
  • Parameters may vary depending upon the nature of the sample
Points to be noted
  • Samples should not be toxic, reactive or volatile in nature
  • Sample should be well dispersed and vacuum dried

Location: SMITA Analytical Lab, TX-110 A, Dept. of Textile Technology, IIT Delhi