Field Emission Scanning Electron Microscope with Environmental SEM
FEI Quanta 200F integrated with Oxford-EDS
system IE 250 X Max 80, Netherlands
Features The Quanta
200 FEG uses a field-emission gun
(FEG) electron source and can be switched between three vacuum
modes enabling the investigation of conductive, non-conductive
and high-vacuum incompatible materials. It offers
nanometer resolution and a high signal to noise ratio in both regular
high vacuum and environmental modes.
The EDS consists of an 80 mm2 SDD detector which enables detection of elements under high resolution.
Performance - Three vacuum modes - High, Low and ESEM modes
- Samples can be studied in pressures up to 5 Torr
- BSED, ETD, LFD and STEM detector are also incorporated
- The Wet SEM provides imaging at relative humidity
conditions up to 100%
- Manual user interface EDS with 80 mm2 SDD
detector can be used in three modes: point & ID, analyzer and mapping
- Resolution: 2 nm
Applications - Surface
morphology of all kinds of conductive and non-conductive samples including
nano to micro scale structures, films, ceramics etc. can be analyzed
- Texture
information by performing phase identification through BSED
- Elemental
detection and orientation mapping can be done by EDS
Sample Specifications - Conductive and non-conductive solid
samples can be analyzed
- Non-conductive samples can be analyzed
under low vacuum mode or must be sputter coated either with gold, platinum or silver
for high vacuum mode
- Gel and liquid samples can also be analyzed using Peltier stage under different conditions
- Height: 1 - 1.5 cm
- Minimum amount required for
analysis
- 5 mg for powder sample
- 1X1 cm2 for films
- 100 µl for
liquid sample
Testing Parameters - Magnification: 50X to approx 200,000X
depending on the nature of the sample
- Voltage: 2 kV to 30 kV
- Parameters may vary depending upon
the nature of the sample
Points to be noted - Samples should not be
toxic, reactive or volatile in nature
- Sample should be well
dispersed and vacuum dried
Location: SMITA Analytical Lab, TX-110 A, Dept. of Textile Technology, IIT Delhi |
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