Bench Top Sputter
Coater BT 150
from Hind High Vacuum Pvt Ltd, India
Fully
automatic compact bench top sputter coater for FE-SEM sample preparation. The system is specified with two-stage
rotary pump for ‘everyday’ operation and
turbo pump option for high vacuum conditions. BT150 systems are fitted
with an integrated source shutter and a 100mm diameter rotary stage. The system is integrated into
the touch-screen controller and provides control of the thickness of sputtered films.
The control system can store up to 30 different process recipes for easy recall
and can output process data to a separate device for storage. Performance Single magnetron source. DC sputter power supply, 5m3/h
two stage rotary pump and 62l/s compound turbomolecular pump with on-board
controller, Vacuum performance of (5x10-2mbar
in <3 minutes rotary pump) and 5x10-5mbar in <8 minutes (turbo
pump), Integrated PLC with colour touch screen, Film thickness monitor and
control Application FESEM sample preparation
Thin film deposition Location: SMITA Analytical Lab, IIT Delhi, Hauz Khas Charges: As applicable |
|